Semiconductor laser confocal and interference microscopy

Tony Wilson; Rimas Juskaitis; Nigel P. Rea

doi:10.1117/12.237463

10 April 1996 Semiconductor laser confocal and interference microscopy

Tony Wilson, Rimas Juskaitis, Nigel P. Rea

Proceedings Volume 2655, Three-Dimensional Microscopy: Image Acquisition and Processing III; (1996) https://doi.org/10.1117/12.237463
Event: Electronic Imaging: Science and Technology, 1996, San Jose, CA, United States

Abstract

We describe a semiconductor laser confocal interference microscope that is capable of producing both confocal images and high resolution surface profiles. The system is based on an optical fiber interferometer together with injection current modulation. We also address the issue of resolution in phase imaging.

Citation Download Citation

Tony Wilson, Rimas Juskaitis, and Nigel P. Rea "Semiconductor laser confocal and interference microscopy", Proc. SPIE 2655, Three-Dimensional Microscopy: Image Acquisition and Processing III, (10 April 1996); https://doi.org/10.1117/12.237463

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