Paper
25 March 1996 Integrated ATR-leaky waveguide-mode sensor head fabricated by laser beam etching
Stefan Nischwitz, Tomas R. Sterkenburgh, Hilmar Franke
Author Affiliations +
Abstract
Starting with a piece of PMMA (2 mm by 2 cm by 5 cm) a pattern for an integrated version of an optical gas sensor is recorded using computer controlled carbon dioxide laser beam etching. The sensor principle is the ATR-leaky mode spectroscopy using the shift of the plasmon resonance. Divergent light is created by optical fiber coupling. The resonance shift is observed with an array detector.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stefan Nischwitz, Tomas R. Sterkenburgh, and Hilmar Franke "Integrated ATR-leaky waveguide-mode sensor head fabricated by laser beam etching", Proc. SPIE 2686, Integrated Optics and Microstructures III, (25 March 1996); https://doi.org/10.1117/12.236139
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KEYWORDS
Sensors

Carbon dioxide lasers

Polymers

Head

Etching

Silver

Detector arrays

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