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29 March 1996 Monolithic integration of refractive lenses with vertical-cavity lasers and detectors for optical interconnections
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Abstract
We present a technique for monolithic integration of vertical cavity lasers and detectors with refractive microlenses etched on the back side of the semiconductor substrate in a wafer-scale process. This integration provides collimated or focused laser beam sources for applications in free-space interconnections or for coupling to optical fibers, and it improves the collection efficiency of detectors.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eva M. Strzelecka, G. B. Thompson, Gerald D. Robinson, Matthew G. Peters, Brian Thibeault, Mark Mondry, Vijaysekhar Jayaraman, Frank H. Peters, and Larry A. Coldren "Monolithic integration of refractive lenses with vertical-cavity lasers and detectors for optical interconnections", Proc. SPIE 2691, Optoelectronic Packaging, (29 March 1996); https://doi.org/10.1117/12.236925
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