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29 March 1996 Recent results on long-life 1-kHz excimer laser development
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Abstract
A new high repetition rate laser module on the basis of our latest metal-ceramic laser tube technology is developed. This laser can be operated up to 1 kHz with practically constant output energy of 30 mJ at 248 nm and up to 15 mJ for ArF and XeF. Gas lifetime and window cleaning interval can be extended to 500 million pulses. We present our latest test results for ArF, KrF, and XeF operation. All industrial applications require excellent pulse energy stability. In order to meet this demanding feature we modified the power supply and the high voltage circuit with respect to pulse energy stability. We achieved excellent pulse energy stability at all important laser wavelength with our new high repetition rate laser module, for example a pulse energy fluctuations of Sigma 0.8% at 1 kHz KrF operation.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ulrich Rebhan, Igor Bragin, Frank Voss, and Uwe Stamm "Recent results on long-life 1-kHz excimer laser development", Proc. SPIE 2702, Gas and Chemical Lasers, (29 March 1996); https://doi.org/10.1117/12.236881
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