High-speed high-efficiency 500-W cw CO2 laser hermetization of metal frames of microelectronics devices

Andrey Valentinov Levin

doi:10.1117/12.237728

8 April 1996 High-speed high-efficiency 500-W cw CO₂ laser hermetization of metal frames of microelectronics devices

Andrey Valentinov Levin

Proceedings Volume 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics; (1996) https://doi.org/10.1117/12.237728
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

High-speed, efficient method of laser surface treatment has been developed using (500 W) cw CO₂ laser. The principal advantages of CO₂ laser surface treatment in comparison with solid state lasers are the basis of the method. It has been affirmed that high efficiency of welding was a consequence of the fundamental properties of metal-IR-radiation (10,6 mkm) interaction. CO₂ laser hermetization of metal frames of microelectronic devices is described as an example of the proposed method application.

Citation Download Citation

Andrey Valentinov Levin "High-speed high-efficiency 500-W cw CO₂ laser hermetization of metal frames of microelectronics devices", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237728

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