Paper
8 April 1996 Laser multisensor system for 3D free-form surface noncontact measurement
Bao Hua Zhuang, Jing Jiang, Wenwei Zhang, Shenggang Feng, Mei Luo, Li Chen
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Abstract
In this paper a laser diode multisensor system for 3D free form surface non-contact measurement is described. The basic measuring principle is the optical triangulation method. The influence caused by the measured surface inclination is discussed first. Two prototypes of this system have been developed. One is the laser star multisensor system and the other is the linear polarized laser sensor with four PSDs. There are suitable to measure the machined 3D free form surface as well as the 3D free form surface made of `soft' materials such as clay and wood. The detected displacement is +/- 2 mm and the surface inclination could be up to +/- 90 degrees without a rotation servomechanism to track the surface normal. The computer simulation and experimental results are given.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bao Hua Zhuang, Jing Jiang, Wenwei Zhang, Shenggang Feng, Mei Luo, and Li Chen "Laser multisensor system for 3D free-form surface noncontact measurement", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237731
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KEYWORDS
Sensors

3D metrology

Semiconductor lasers

Laser systems engineering

Prototyping

Computer simulations

Holography

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