Laser planarization of chemical vapor deposited diamond film

Ronald D. Schaeffer; Li Chen; Wen Ho

doi:10.1117/12.237736

8 April 1996 Laser planarization of chemical vapor deposited diamond film

Ronald D. Schaeffer, Li Chen, Wen Ho

Proceedings Volume 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics; (1996) https://doi.org/10.1117/12.237736
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Diamond films are grown by depositing carbon from gaseous species on prepared substrates. This process does not give surface uniformity, especially on the growth side where crystalline formations create very rough surfaces. In addition, there is usually an associated bow of the disc caused by strains in the material after removal from substrate. Since diamond is the hardest material, traditional grinding techniques, while fairly low cost, take an extremely long time. An extension of using lasers for cutting the material into usable shapes is to use lasers for the initial `flattening' procedure. This method has a significantly higher cost per hour, but usually requires much less time for equivalent volume removal. The use of lasers to remove bulk surface volume from CVDD and a few other materials will be discussed. Also, an extension of the fundamental concepts to automated manufacturing will be given.

Citation Download Citation

Ronald D. Schaeffer, Li Chen, and Wen Ho "Laser planarization of chemical vapor deposited diamond film", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237736

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