Maskless fabrication of submicrometer nonharmonic relief gratings for single-frequency DFB semiconductor lasers by three-beam holographic method

Alexander I. Khudobenko; Vladislav Ya. Panchenko; Vladimir N. Seminogov

doi:10.1117/12.237764

8 April 1996 Maskless fabrication of submicrometer nonharmonic relief gratings for single-frequency DFB semiconductor lasers by three-beam holographic method

Alexander I. Khudobenko, Vladislav Ya. Panchenko, Vladimir N. Seminogov

Author Affiliations +

Proceedings Volume 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics; (1996) https://doi.org/10.1117/12.237764
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Three-beam maskless holographic method for fabricating submicron nonharmonic relief structures with phase shift (pi) , which are capable of providing stable single-frequency oscillation at Bragg wavelength in semiconductor DFB lasers, is developed. To demonstrate the effectivity of this method the biharmonic structure with period d approximately equals 0.5 micrometers and quasisinusoidally modulated amplitude, possessing the phase shift (pi) , is fabricated on n-InP surface in the process of liquid-phase laser photoelectrochemical etching.

Citation Download Citation

Alexander I. Khudobenko, Vladislav Ya. Panchenko, and Vladimir N. Seminogov "Maskless fabrication of submicrometer nonharmonic relief gratings for single-frequency DFB semiconductor lasers by three-beam holographic method", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237764

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