Interaction of laser-induced quasi-stationary plasma flow with substrates

Vladimir N. Anisimov; Valeria G. Grishina; Oleg N. Derkach; Andrey Yu. Sebrant; Maria A. Stepanova

doi:10.1117/12.234194

1 March 1996 Interaction of laser-induced quasi-stationary plasma flow with substrates

Vladimir N. Anisimov, Valeria G. Grishina, Oleg N. Derkach, Andrey Yu. Sebrant, Maria A. Stepanova

Proceedings Volume 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95; (1996) https://doi.org/10.1117/12.234194
Event: Fifth International Conference on Industrial Laser and Laser Applications '95, 1995, Shatura, Moscow, Russian Federation

Abstract

The effects of interaction of quasi-stationary carbon plasma flow with a substrate have been studied using time-integrated and time-resolved emission spectroscopy and ion time-of-flight technique. Plasma flow with typical electron density of order of 10¹⁸ cm^-3 and temperature of 5 eV was created with 5 ms pulses of TEA carbon-dioxide laser. Plasma- substrate interaction has been shown to result in significant variation of plasma parameters and plasma composition near the surface of the substrate.

Citation Download Citation

Vladimir N. Anisimov, Valeria G. Grishina, Oleg N. Derkach, Andrey Yu. Sebrant, and Maria A. Stepanova "Interaction of laser-induced quasi-stationary plasma flow with substrates", Proc. SPIE 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95, (1 March 1996); https://doi.org/10.1117/12.234194

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