Ion-assisted deposition of optical coatings

Zhengxiu Fan; Rui-Ying Fan; Xuefei Tang

doi:10.1117/12.240422

27 May 1996 Ion-assisted deposition of optical coatings

Zhengxiu Fan, Rui-Ying Fan, Xuefei Tang

Author Affiliations +

Proceedings Volume 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995; (1996) https://doi.org/10.1117/12.240422
Event: Laser-Induced Damage in Optical Materials: 1995, 1995, Boulder, CO, United States

Abstract

Ion assisted deposition technique and effects of this technique on properties of optical coatings are investigated in this paper. We have produced thin-film samples by bombarding with different ions such as oxygen, argon and mixture of the two during deposition, of which the refractive index, the extinctive coefficient and the laser induced damage threshold are analyzed in detail.

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Zhengxiu Fan, Rui-Ying Fan, and Xuefei Tang "Ion-assisted deposition of optical coatings", Proc. SPIE 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, (27 May 1996); https://doi.org/10.1117/12.240422

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