Peculiarities of the dynamics of the relief induced by two-beam laser interference on silicon surface near the melting threshold

Mikhail N. Libenson; Vladimir S. Makin; Yu. I. Pestov; Vladimir V. Trubaev

doi:10.1117/12.240426

27 May 1996 Peculiarities of the dynamics of the relief induced by two-beam laser interference on silicon surface near the melting threshold

Mikhail N. Libenson, Vladimir S. Makin, Yu. I. Pestov, Vladimir V. Trubaev

Author Affiliations +

Proceedings Volume 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995; (1996) https://doi.org/10.1117/12.240426
Event: Laser-Induced Damage in Optical Materials: 1995, 1995, Boulder, CO, United States

Abstract

To study the material mechanisms of laser-induced silicon microrelief formation the periodic space-modulated heating up to melting point was used. On the basis of measurements of dynamics of surface thermal radiation and of the relief height the conclusion about material mechanisms of relief formation had been made.

Citation Download Citation

Mikhail N. Libenson, Vladimir S. Makin, Yu. I. Pestov, and Vladimir V. Trubaev "Peculiarities of the dynamics of the relief induced by two-beam laser interference on silicon surface near the melting threshold", Proc. SPIE 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, (27 May 1996); https://doi.org/10.1117/12.240426

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