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1 May 1996Ultraquiet platform for active vibration isolation
This paper describes an active/passive system designed to provide a stable, isolated platform for vibration-sensitive equipment. The UltraQuiet Platform includes three subsystems: a six- strut, six-axis passive-active vibration isolation mount, a damped support bench, and specialized vibration isolation mounts which reduce transmission of narrowband vibration from individual noisy components on the quiet platform. This paper emphasizes the six-axis Stewart platform active isolation system, which uses a novel series approach to active-passive isolation within each strut. The stiff electromagnetic actuator and geophone velocity sensors in the struts are described. Control design and active vibration isolation performance are summarized. Vibration reduction of up to 20 dB was demonstrated over a 100 Hz bandwidth. Reduction in isolation performance which resulted when the system was mated with a highly flexible base structure is noted.
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Eric H. Anderson, Donald J. Leo, Mark D. Holcomb, "Ultraquiet platform for active vibration isolation," Proc. SPIE 2717, Smart Structures and Materials 1996: Smart Structures and Integrated Systems, (1 May 1996); https://doi.org/10.1117/12.239046