Friction in surface-micromachined microengines

Samuel L. Miller; Jeffry J. Sniegowski; Glen LaVigne; Paul J. McWhorter

doi:10.1117/12.240444

20 May 1996 Friction in surface-micromachined microengines

Samuel L. Miller, Jeffry J. Sniegowski, Glen LaVigne, Paul J. McWhorter

Proceedings Volume 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS; (1996) https://doi.org/10.1117/12.240444
Event: 1996 Symposium on Smart Structures and Materials, 1996, San Diego, CA, United States

Abstract

Understanding the frictional properties of advanced Micro-Electro-Mechanical Systems (MEMS) is essential in order to develop optimized designs and fabrication processes, as well as to qualify devices for commercial applications. We develop and demonstrate a method to experimentally measure the forces associated with sliding friction of devices rotating on a hub. The method is demonstrated on the rotating output gear of the microengine recently developed at Sandia National Laboratories. In-situ measurements of an engine running at 18300 rpm give a coefficient of friction of 0.5 for radial (normal) forces less than 4 (mu) N. For larger forces the effective coefficient of friction abruptly increases, suggesting a fundamental change in the basic nature of the interaction between the gear and hub. The experimental approach we have developed to measure the frictional forces associated with the microengine is generically applicable to other MEMS devices.

Citation Download Citation

Samuel L. Miller, Jeffry J. Sniegowski, Glen LaVigne, and Paul J. McWhorter "Friction in surface-micromachined microengines", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); https://doi.org/10.1117/12.240444

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available