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20 May 1996Integration of thin film electronics and MEMS
The integration of thin film electronics and opto-electronics with MEMs is discussed. Thin film electronics and opto-electronics based on amorphous silicon or polycrystalline silicon are considered for integration with MEMs devices based on piezoelectric thin films or on amorphous or poly-Si thin films.
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Stephen J. Fonash, "Integration of thin film electronics and MEMS," Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); https://doi.org/10.1117/12.240430