Depth-of-focus increase based on detector pixel size in optical microscopes

Wei P. Chen; Stephen D. Kirkish; Donald Parker

doi:10.1117/12.240128

21 May 1996 Depth-of-focus increase based on detector pixel size in optical microscopes

Wei P. Chen, Stephen D. Kirkish, Donald Parker

Proceedings Volume 2725, Metrology, Inspection, and Process Control for Microlithography X; (1996) https://doi.org/10.1117/12.240128
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

This paper presents an analysis of depth of focus (DOF) based on optics or detector pixel size in optical microscopes with electronic cameras. We first generally analyze DOF based on optics in different cases related to the spatial coherence of illumination and the object, and then use a design example of an infinity correction system for a review system to show DOF dependence on illumination numerical aperture. Finally, we discuss DOF increase based on detector pixel size, and then use a design example of an infinity correction system for the inspection system. Both designs are verified with simulation using CODEV, an optical design software. Both designs are used in KLA STAR-light^TM multi-surface inspection (backside glass and pellicles).

Citation Download Citation

Wei P. Chen, Stephen D. Kirkish, and Donald Parker "Depth-of-focus increase based on detector pixel size in optical microscopes", Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996); https://doi.org/10.1117/12.240128

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