Application of alternating phase-shifting masks to sub-quarter-micrometer contact holes

Sung-Chul Lim; Jongwook Kye; Sang-Gyun Woo; Sunggi Kim; Hoyoung Kang; Woo-Sung Han; Young-Bum Koh

doi:10.1117/12.240950

7 June 1996 Application of alternating phase-shifting masks to sub-quarter-micrometer contact holes

Sung-Chul Lim, Jongwook Kye, Sang-Gyun Woo, Sunggi Kim, Hoyoung Kang, Woo-Sung Han, Young-Bum Koh

Proceedings Volume 2726, Optical Microlithography IX; (1996) https://doi.org/10.1117/12.240950
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

The performance of alternating PSM and its modified type applicable to sub-quarter micron contact holes were studied via both simulations and experiments. We focused on the contact holes as follows: the pitch of one direction was fixed to 0.4micrometers (0.73(lambda) /NA) and the pitches of another direction were varied from 0.4micrometers to 1.6micrometers (2.9(lambda) /NA). Simulations and experiments were performed with a KrF excimer system (0.45 NA and 0.3 coherence factor). The alternating PSM provided benefits in printing highly packed contact holes, whereas the hybrid PSM having a mixed form of alternating PSM and outrigger PSM showed its effects for the contact holes packed only in one direction. It was found that the performance of PSM was strongly affected by duty ratios of the contact holes. In particular, the hybrid PSM improved both the roundness of contact holes and the depth-of- focus, enabling 0.45(lambda) /NA contact holes to be printed. Therefore, either the alternating or the hybrid PSM may extend the lifetime of the optical lithography.

Citation Download Citation

Sung-Chul Lim, Jongwook Kye, Sang-Gyun Woo, Sunggi Kim, Hoyoung Kang, Woo-Sung Han, and Young-Bum Koh "Application of alternating phase-shifting masks to sub-quarter-micrometer contact holes", Proc. SPIE 2726, Optical Microlithography IX, (7 June 1996); https://doi.org/10.1117/12.240950

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available