Design considerations and performance of 1-kHz KrF excimer lasers for DUV lithography

Richard G. Morton; Igor V. Fomenkov; William N. Partlo; Palash P. Das; Richard L. Sandstrom

doi:10.1117/12.240983

7 June 1996 Design considerations and performance of 1-kHz KrF excimer lasers for DUV lithography

Richard G. Morton, Igor V. Fomenkov, William N. Partlo, Palash P. Das, Richard L. Sandstrom

Proceedings Volume 2726, Optical Microlithography IX; (1996) https://doi.org/10.1117/12.240983
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

The operation of 1 kHz KrF lasers for DUV lithography applications requires a design which minimizes perturbations to the optical and electrical properties of the gas present, at one millisecond intervals in the lasing region and vicinity. The optimum design results from a compromise between electrical and fluid dynamic requirements, since these cannot be simultaneously fully satisfied. Other constraints on a commercially viable design are those rooted in issues such as manufacturability, safety, cost, compatibility with fluorine, and service lifetime of the resulting structure. CYMER has successfully engineered a laser which produces linear average power output scaling with pulse repetition rates to 1 kHz at a line- narrowed bandwidth of less than 0.8 pm. The stabilized pulse energy is 10 mJ with a FWHM of approximately 15 nS, producing an average power of 10W at 1 kHz pulse repetition rate. The 3(sigma) value of pulse energy stability is 5 percent. In addition, the chamber exhibits low fluorine consumption and a lifetime in excess of 2 billion shots. Measured performance data are presented along with a general system layout and facilities requirements.

Citation Download Citation

Richard G. Morton, Igor V. Fomenkov, William N. Partlo, Palash P. Das, and Richard L. Sandstrom "Design considerations and performance of 1-kHz KrF excimer lasers for DUV lithography", Proc. SPIE 2726, Optical Microlithography IX, (7 June 1996); https://doi.org/10.1117/12.240983

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