Paper
27 June 1996 Development of a miniaturized integrated optical spectrometer for the infrared spectral range
Roman V. Kruzelecky, Stephane Paquet, Asoke Kumar Ghosh, Christine L. Tremblay, Jocelyn Lauzon, Nelson Landry
Author Affiliations +
Abstract
A miniaturized, planar-grating optical spectrometer for the 2 to 6 micrometer range has been designed and fabricated. This has entailed development of a slab waveguide structure suitable for the infrared, a broad-band optical grating structure and fiber-based, IR input/output optics. Broad- band light is coupled into the spectrometer through a pig- tailed IR fiber and is subsequently dispersed into its spectral components and can be focused either onto a thermo- electrically (TE) cooled HgCdZnTe detector array or an IR fiber array. Integration of the optics and detector provides exceptional optical alignment and a very compact package that is suitable for various airborne and terrestrial applications.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roman V. Kruzelecky, Stephane Paquet, Asoke Kumar Ghosh, Christine L. Tremblay, Jocelyn Lauzon, and Nelson Landry "Development of a miniaturized integrated optical spectrometer for the infrared spectral range", Proc. SPIE 2744, Infrared Technology and Applications XXII, (27 June 1996); https://doi.org/10.1117/12.243512
Lens.org Logo
CITATIONS
Cited by 4 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Waveguides

Spectroscopy

Reactive ion etching

Infrared spectroscopy

Silicon

Signal attenuation

Etching

Back to Top