Manufacturing error measurement for minute aspherical lens using Mach-Zehnder interferometer

Minoru Oshikiri; Kimihiko Nishioka

doi:10.1117/12.246765

19 August 1996 Manufacturing error measurement for minute aspherical lens using Mach-Zehnder interferometer

Minoru Oshikiri, Kimihiko Nishioka

Proceedings Volume 2775, Specification, Production, and Testing of Optical Components and Systems; (1996) https://doi.org/10.1117/12.246765
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

In recent years we have used several kinds of aspherical lenses in our minute optical system. To assure the lens quality, establishing definite evaluation technique of the aspherical lenses has been required as one of the most important matters. For that purpose, we developed a technique using the Mach-Zehnder interferometer. Mach- Zehnder interferometry has the capability of estimating the total characteristic of an aspherical lens in almost the same situation as the lens is under practical use. However it has difficulty in finding out that what kinds of manufacturing errors exist and how much the errors are. Our method concerns these problems and solves by the following: (1) obtain differential coefficients of Zernike coefficients for the aspherical test sample lens by the computer simulation, giving small manufacturing errors; and (2) separate quantitatively each manufacturing error by solving the first-order-simultaneous-equation constructed with the above differential coefficients and the measured values of the Zernike coefficients.

Citation Download Citation

Minoru Oshikiri and Kimihiko Nishioka "Manufacturing error measurement for minute aspherical lens using Mach-Zehnder interferometer", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246765

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available