Microstructured multilayer dielectric coatings with binary optical functions

Marcus Frank; Uwe B. Schallenberg; Norbert Kaiser

doi:10.1117/12.246819

19 August 1996 Microstructured multilayer dielectric coatings with binary optical functions

Marcus Frank, Uwe B. Schallenberg, Norbert Kaiser

Proceedings Volume 2776, Developments in Optical Component Coatings; (1996) https://doi.org/10.1117/12.246819
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

Micropatterned interference filters have been developed by dry etching of dielectric multilayer stacks. Apart from the optical demands on the conventional filter design there are new requirements originating from the patterning process, which has to be stopped at the interface between two layers. In this paper the fundamental problems associated with the design and the development of micropatterned multilayer dielectric stacks are discussed. Details of the production of a two-stage filter array are described and experimental results are presented.

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Marcus Frank, Uwe B. Schallenberg, and Norbert Kaiser "Microstructured multilayer dielectric coatings with binary optical functions", Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); https://doi.org/10.1117/12.246819

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KEYWORDS

Dielectrics

Etching

Multilayers

Dielectric filters

Dry etching

Optical coatings

Binary data

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