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19 August 1996 Study of thin film inhomogeneity with a fast-scanning acousto-optic spectrophotometer
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Abstract
A novel device, the fast-scanning acousto-optic spectrophotometer, was used to measure the in situ reflectance of a thin film during deposition. The reflectance data, which was measured at different film thicknesses and over a wavelength region from 400 to 1100 nm, was used to study the refractive index profile of inhomogeneous ZrO2 films. This data was subsequently analyzed using a homogeneous thin film model to derive an 'effective' refractive index profile.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander V. Tikhonravov, Michael K. Trubetskov, Andrew N. Tikhonov, Oleg B. Tcherednichenko, Boris G. Lysoi, Ksenia V. Mikhailova, Brian Thomas Sullivan, and Jerzy A. Dobrowolski "Study of thin film inhomogeneity with a fast-scanning acousto-optic spectrophotometer", Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); https://doi.org/10.1117/12.246817
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