Criteria of image performance for high-precision imaging of sharp-edged 2-dimensional objects

Johannes Schlichting

doi:10.1117/12.2298903

1 September 1996 Criteria of image performance for high-precision imaging of sharp-edged 2-dimensional objects

Johannes Schlichting

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27780L (1996) https://doi.org/10.1117/12.2298903
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

It is well known that in the case of very high precise reproducing of sharp-edged two- dimensional objects by imaging there are several and especially nonlinear influences. This is important in cases of fotolithography and of high-precision measurement of edge position. in this case there are high contrast objects like masks which leads to an essentially nonlinear interaction of diffraction, interference, and illumination in image generation. For this reason there is a nonlinear influence of wavefront distortion (aberrations of the imaging system) on image intensity distribution. /1/,/2/. Because of this reasons and the fact, that the design and adjustment /3/,/4/ of high performance optical systems has to take into account also very small residual aberrations, the question of optimum aberration balancing for edge imaging is worth to be considered in more detail.

Citation Download Citation

Johannes Schlichting "Criteria of image performance for high-precision imaging of sharp-edged 2-dimensional objects", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27780L (1 September 1996); https://doi.org/10.1117/12.2298903

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