Assembly and adjustment of a lithographic lens

U. Kruger

doi:10.1117/12.2298953

1 September 1996 Assembly and adjustment of a lithographic lens

U. Kruger

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27781Z (1996) https://doi.org/10.1117/12.2298953
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

The imaging performance of projection lenses is strongly influenced by the used tools and procedures of assembly and adjustment. This paper presents the experience we have, using the example of a wide-field g-line lens.

Citation Download Citation

U. Kruger "Assembly and adjustment of a lithographic lens", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781Z (1 September 1996); https://doi.org/10.1117/12.2298953

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