Paper
1 September 1996 Water absorption on the polished stainless steel surface studied by ellipsometry
Hyunsoo Nham
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27783B (1996) https://doi.org/10.1117/12.2299001
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
A photoelastic modulation (PEM) ellipsometry is employed to study a water adsorption on SUS 310 surface in air as a function of relative humidity change. A natural evaporation type humidity generation method and a divided-flow type humidity generator is used to control the humidity in a chamber in room temperature condition. Detected signal shows strong ties to room temperature fluctuations and drift of optical properties of ellipsometric components including light source. Under even such a rough environment, adsorption occured and optical response is detected as relative humidity changes.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hyunsoo Nham "Water absorption on the polished stainless steel surface studied by ellipsometry", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27783B (1 September 1996); https://doi.org/10.1117/12.2299001
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