Examination of photodoping phenomenon by in-situ ellipsometric observation

J. Lee

doi:10.1117/12.2299017

1 September 1996 Examination of photodoping phenomenon by in-situ ellipsometric observation

J. Lee

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27783R (1996) https://doi.org/10.1117/12.2299017
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

Phenomenon due to Ag photodoping into amorphous As₂S₃ was examined with an ellipsometric method. Obtained values of ellipsometric parameters Ψ and ∆ were fitted by using multilayer model. It was found that each thickness of Ag, Ag:As₂S₃ and As₂S₃ layers showed a time dependent change during the diffusion process in photodoping and the optical constants of As₂S₃ change remarkably by Ag photodoping. These behaviors were explained in relation with photodoping mechanism.

Citation Download Citation

J. Lee "Examination of photodoping phenomenon by in-situ ellipsometric observation", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27783R (1 September 1996); https://doi.org/10.1117/12.2299017

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