XeCl excimer laser with high repetition rate and low divergence beam

Yingzi Nan

doi:10.1117/12.2316046

1 September 1996 XeCl excimer laser with high repetition rate and low divergence beam

Yingzi Nan

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27789X (1996) https://doi.org/10.1117/12.2316046
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

Configuration and performance of a high repetition rate XeCl excimer laser are reported. The laser maximum output energy is 415 mJ. Maximum average power is 35 W at repetition rate of 110 Hz. When unstable resonator optics are adopted on the laser. Beam divergence are improved about 10 times but expense of output energy in 30%.

Citation Download Citation

Yingzi Nan "XeCl excimer laser with high repetition rate and low divergence beam", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27789X (1 September 1996); https://doi.org/10.1117/12.2316046

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