Stress-optimised shape memory microactuator

K. D. Skrobanek; Manfred Kohl; Shuichi Miyazaki

doi:10.1117/12.237168

26 April 1996 Stress-optimised shape memory microactuator

K. D. Skrobanek, Manfred Kohl, Shuichi Miyazaki

Proceedings Volume 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials; (1996) https://doi.org/10.1117/12.237168
Event: 3rd International Conference on Intelligent Materials, 1996, Lyon, France

Abstract

A shape memory membrane actuator has been developed, which consists of stress-optimized microfabricated NiTi beam-cantilever devices of 100 micrometers thickness. For stress- optimization, the lateral widths of the beams have been designed for homogeneous stress distributions without local stress maxima, allowing a maximum use of active material for bending actuation. As a result, higher work outputs for a given stress level and smaller hystereses are obtained compared to non-optimized actuators with parallel beam-cantilever devices. Thus, improved hysteresis control is possible and better lifetime characteristics are expected. For a strain limit of 2% the achieved work output is about 24 (mu) Nm.

Citation Download Citation

K. D. Skrobanek, Manfred Kohl, and Shuichi Miyazaki "Stress-optimised shape memory microactuator", Proc. SPIE 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials, (26 April 1996); https://doi.org/10.1117/12.237168

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