Displacement field measurement in the nanometer range

Yves Surrel; Nicolas Fournier

doi:10.1117/12.250749

18 September 1996 Displacement field measurement in the nanometer range

Yves Surrel, Nicolas Fournier

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250749
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

The grid method is a classical tool for displacement measurement, which provides field data. This method has benefited very much from the phase-shifting technique in recent years. Two examples of applications of this method in the nanometer range are presented. The first one concerns the materials science: it is shown that microgrids observed by SEM can provide displacement field data with an accuracy of a few nanometers. The second one concerns the measurement of a rigid-body displacement. In this case, displacement data can be averaged over the whole field, drastically increasing the sensitivity. It is shown that a sensitivity of 7 nm can be achieved by using a coarse grid with 8 lines per mm. This sensitivity corresponds to 1/18000 of the grid pitch.

Citation Download Citation

Yves Surrel and Nicolas Fournier "Displacement field measurement in the nanometer range", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250749

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