Multispectral measurements of slightly anisotropic thin films by guided optics method

Josep Massaneda; Francois Flory; Salvador Bosch; Jordi Martorell; Serge Monneret

doi:10.1117/12.250799

18 September 1996 Multispectral measurements of slightly anisotropic thin films by guided optics method

Josep Massaneda, Francois Flory, Salvador Bosch, Jordi Martorell, Serge Monneret

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250799
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

We report quantitative evidence of the slight anisotropic behavior of several Ta₂O₅ dielectric thin films. Refractive indices and thickness have been determined by using the prism-film coupler setup. In order to obtain dispersion values for the refractive indices, the measurements have been realized at four different wavelengths, 632.8, 514.5, 488.0 and 457.9 nm. We have checked the results by measuring the layers with two different prisms. A new numerical approach to the problem has been useful to determine the parameters of the layers.

Citation Download Citation

Josep Massaneda, Francois Flory, Salvador Bosch, Jordi Martorell, and Serge Monneret "Multispectral measurements of slightly anisotropic thin films by guided optics method", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250799

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