Thin-cavity interferometric sensors for detection of weak radiation flux and microvibrations

Maurice Patrick Whelan; Robert P. Kenny; John T. Sheridan; Constantin Th. Coutsomitros

doi:10.1117/12.250807

18 September 1996 Thin-cavity interferometric sensors for detection of weak radiation flux and microvibrations

Maurice Patrick Whelan, Robert P. Kenny, John T. Sheridan, Constantin Th. Coutsomitros

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250807
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

Novel optical sensors for the detection of weak radiation flux transients and mechanical micro-vibrations have been developed. The sensors are based on the modulation of an interference pattern created during the optical interrogation of a thin air cavity similar to a low finesse Fabry-Perot or Fizeau interferometer, formed between two parallel glass holographic plates. In the detection of radiation flux the sensor demonstrates high sensitivity, good stability and a fast response. When adapted to the measurement of mechanical micro-vibrations, high sensitivity at low frequencies can be achieved. In order to understand and optimize sensor performance, the mechanical, thermal and optical characteristics of the devices have been modelled theoretically and with finite element analysis. A principal feature of the devices is their low cost and potential for miniaturization thus making them suitable for a wide range of industrial applications.

Citation Download Citation

Maurice Patrick Whelan, Robert P. Kenny, John T. Sheridan, and Constantin Th. Coutsomitros "Thin-cavity interferometric sensors for detection of weak radiation flux and microvibrations", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250807

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