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26 August 1996 Feedback interferometry with semiconductor laser for high-resolution displacement sensing
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Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248490
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Abstract
We present the prototype of a laser feedback interferometer for displacement measurement with micrometric resolution and directional discrimination, which we propose for applications in industrial environment. The instrument incorporates a PC-interfaced electronic unit connected with the optical head, which is very compact thanks to the selected optical configuration and to the use of a semiconductor laser. Infrared as well as red emitting lasers have been used for operation on reflecting and diffusing targets.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Silvano Donati, Sabina Merlo, and Francesco Micolano "Feedback interferometry with semiconductor laser for high-resolution displacement sensing", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); https://doi.org/10.1117/12.248490
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