Micro-optical devices based on free-space optics with LIGA micro-optical benches: examples and perspectives

Juergen Mohr; Jost Goettert; Andre Mueller

doi:10.1117/12.248509

26 August 1996 Micro-optical devices based on free-space optics with LIGA micro-optical benches: examples and perspectives

Juergen Mohr, Jost Goettert, Andre Mueller

Author Affiliations +

Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248509
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

Microtechnology offers the possibility to fabricate photonic devices. Especially the LIGA technique allows the fabrication of micro-optical benches for free-space optical set-ups, with mounts for inserting hybrid components structured to micrometer accuracy well aligned to each other. These optical benches are not only used to build up passive optical devices but also opto-mechanical systems have been realized. Also concepts to integrate active optical components like laser and photo diodes have been tested. In the paper the concept and the technology to fabricate hybrid micro-optical systems is described. Two systems, a bi-directional transceiver module and an opto- mechanical by pass switch have been fabricated and evaluated. Their performance data prove the ability of the concept of micro-optical functioning modules based on free- space micro-optical systems fabricated by LIGA technique and assembly.

Citation Download Citation

Juergen Mohr, Jost Goettert, and Andre Mueller "Micro-optical devices based on free-space optics with LIGA micro-optical benches: examples and perspectives", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); https://doi.org/10.1117/12.248509

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available