Microactuator for microwave antennas

Dominique Chauvel; Dominique Collard; Hiroyuki Fujita

doi:10.1117/12.248486

26 August 1996 Microactuator for microwave antennas

Dominique Chauvel, Dominique Collard, Hiroyuki Fujita

Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248486
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

Our main research topic is the integration of micromechanics and micro electronics to perform new kinds of microwave device functions. We presently focus our work on the realization of microwave antennas, which can be tilted mechanically to perform the spatial scanning of the emitted microwave beam. We present in this paper the mechanical part of the device: the tilting support on which microwave antenna has to be patterned. This mechanical support is a fused quartz plate metallized on both its faces, suspended by two thin torsion hinges and electrostatically driven by two fixed electrodes. Deflexion angles of 10 degrees may be obtained with voltage under 100 V.

Citation Download Citation

Dominique Chauvel, Dominique Collard, and Hiroyuki Fujita "Microactuator for microwave antennas", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); https://doi.org/10.1117/12.248486

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