X-ray interferometry technique for mirror and multilayer characterization

Igor A. Schelokov; Olivier Hignette; Carsten Raven; Anatoly A. Snigirev; Irina Snigireva; Alexey Suvorov

doi:10.1117/12.245104

19 July 1996 X-ray interferometry technique for mirror and multilayer characterization

Igor A. Schelokov, Olivier Hignette, Carsten Raven, Anatoly A. Snigirev, Irina Snigireva, Alexey Suvorov

Proceedings Volume 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III; (1996) https://doi.org/10.1117/12.245104
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

X-ray beams delivered by third generation synchrotron radiation machines have a high degree of coherence that allows to use different coherent imaging techniques such as phase contrast microscopy, holography, and phase-contrast tomography in the high-energy domain. The question arises to what extent the existing optical elements such as mirrors and multilayers are capable of preserving this high spatial coherence. A theory of partially coherent x-ray scattering by a slightly modulated mirror surface under total reflection is developed. This gives estimations for intensity contrast as a function of the surface modulation. X-ray topography with coherent light is proposed and applied for mirror diagnostics. X-ray interferometry in an in-line holography setup is used to describe the coherence properties of the x-ray beam including optical components like mirror and multilayers. It is shown that significant improvements of the polishing process are still needed for the long mirrors while small state-of-the-art mirrors (less than 100 nm) are nearly adequate.

Citation Download Citation

Igor A. Schelokov, Olivier Hignette, Carsten Raven, Anatoly A. Snigirev, Irina Snigireva, and Alexey Suvorov "X-ray interferometry technique for mirror and multilayer characterization", Proc. SPIE 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III, (19 July 1996); https://doi.org/10.1117/12.245104

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