Self-calibrating modulation ellipsometer

Stephen Ducharme; Hassanayn Machlab; Paul G. Snyder; John A. Woollam; Ron A. Synowicki

doi:10.1117/12.255374

25 October 1996 Self-calibrating modulation ellipsometer

Stephen Ducharme, Hassanayn Machlab, Paul G. Snyder, John A. Woollam, Ron A. Synowicki

Proceedings Volume 2839, Fiber Optic and Laser Sensors XIV; (1996) https://doi.org/10.1117/12.255374
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

A new self-calibrating modulation ellipsometer (SCME) has demonstrated outstanding accuracy, utility, reliability, and speed. The ellipsometer is well suited to in-situ monitoring of surface degradation, film growth or etching, and quality control. The design incorporates several novel features including: (1) full self calibration, (2) high speed, (3) high accuracy, (4) high signal-to-noise ratio, (5) compactness, (6) reliability, and (7) no moving parts. The design is portable, can be fully automated, and is suitable for use in remote and harsh environments. A complete prototype instrument incorporates all optical components, mechanical mounts with flexible configuration options, custom electronic components, signal acquisition, computer control, data analysis, and a user interface, all integrated into a self-contained, user-friendly, system. It operates at fixed wavelength and incidence angle, though both can be changed by the operator in a few minutes as desired. Quantitative testing verified the absolute accuracy and suitability for monitoring real-time in-situ film growth and etching.

Citation Download Citation

Stephen Ducharme, Hassanayn Machlab, Paul G. Snyder, John A. Woollam, and Ron A. Synowicki "Self-calibrating modulation ellipsometer", Proc. SPIE 2839, Fiber Optic and Laser Sensors XIV, (25 October 1996); https://doi.org/10.1117/12.255374

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