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22 November 1996 In-situ surface monitoring system for synchrotron mirrors under high heat load
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A portable electro-optical system capable of real-time measurements of surface distortions down to 0.5 (mu) rad is described, limited primarily by the short-term system stability. Methods to reduce the system fluctuations and to enhance the detectable resolution are explained. Although designed for use with mirrors for synchrotron radiation sources, this system has the flexibility to be applied to other optical components. The prototype system has been tested on a sample mirror piece, and preliminary results are presented. A brief discussion about the extension of this metrology unit to adaptive optics is also given.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter H. Mui, George Srajer, and Dennis M. Mills "In-situ surface monitoring system for synchrotron mirrors under high heat load", Proc. SPIE 2856, Optics for High-Brightness Synchrotron Radiation Beamlines II, (22 November 1996);


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