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22 November 1996 New schemes for producing high-accuracy elliptical x-ray mirrors by elastic bending
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Abstract
Although x-ray micro-foci can be produced by a variety of diffractive methods, grazing incidence mirrors are the only route to an achromatic focus. In this paper we describe our efforts to produce elliptically shaped mirrors with the very high figure accuracy necessary for producing a micro-focus. The motivation for this work is provided by the need to produce achromatic foci for a range of applications ranging from tunable micro-focus x-ray photoelectron spectroscopy ((mu) -XPS) at soft x-ray energies to micro-focus white beam x-ray diffraction ((mu) -XRD) at hard x-ray energies. We describe the methodology of beam bending, a practical example of a system we have produced for (mu) -XRD, and results demonstrating the production of a surface with micro-radian figure accuracy.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Howard A. Padmore, Malcolm R. Howells, Steven C. Irick, Timothy R. Renner, Reuben Sandler, and Y.-M. Koo "New schemes for producing high-accuracy elliptical x-ray mirrors by elastic bending", Proc. SPIE 2856, Optics for High-Brightness Synchrotron Radiation Beamlines II, (22 November 1996); https://doi.org/10.1117/12.259867
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