Paper
22 November 1996 Optimization software for XUV monochromators
Eric Delcamp, Bruno Lagarde, Francois A. Polack, Jean Susini
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Abstract
Though optimization softwares are commonly used in visible optical design, none seems to exist for soft x-ray optics. It is shown here that optimization techniques can be applied with some advantages to X-UV monochromator design. A merit function, suitable for minimizing the aberrations is proposed, and the general method of computation is described. Samples of the software inputs and outputs are presented, and compared to reference data. As an example of application to soft X-ray monochromator design, the optimization of the soft X-ray monochromator of the ESRF microscopy beamline is presented. Good agreement between the predicted resolution of a modified PGM monochromator and experimental measurements is reported.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eric Delcamp, Bruno Lagarde, Francois A. Polack, and Jean Susini "Optimization software for XUV monochromators", Proc. SPIE 2856, Optics for High-Brightness Synchrotron Radiation Beamlines II, (22 November 1996); https://doi.org/10.1117/12.259856
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Monochromators

Mirrors

Point spread functions

X-rays

Holography

Wavefront aberrations

X-ray microscopy

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