Translator Disclaimer
Paper
22 November 1996 Significant improvements in Long Trace Profiler measurement performance
Author Affiliations +
Abstract
Modifications made to the Long Trace Profiler (LTP II) system at the Advanced Photon Source at Argonne National Laboratory have significantly improved the accuracy and repeatability of the instrument. The use of a Dove prism in the reference beam path corrects for phasing problems between mechanical errors and thermally-induced system errors. A singe reference correction now completely removes both error signals from the measured surface profile. The addition of a precision air conditioner keeps the temperature in the metrology enclosure constant to within +/- 0.1 degree(s)C over a 24 hour period and has significantly improved the stability and repeatability of the system. We illustrate the performance improvements with several sets of measurements. The improved environmental control has reduced thermal drift error to about 0.75 microradian RMS over a 7.5 hour time period. Measurements made in the forward scan direction and the reverse scan direction differ by only about 0.5 microradian RMS over a 500 mm trace length. We are now able to put 1-sigma error bar of 0.3 microradian on an average of 10 slope profile measurements over a 500 mm long trace length, and we are now able to put a 0.2 microradian error bar on an average of 10 measurements over a 200 mm trace length. The corresponding 1-sigma height error bar for this measurement is 1.1 nm.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Z. Takacs and Cynthia J. Bresloff "Significant improvements in Long Trace Profiler measurement performance", Proc. SPIE 2856, Optics for High-Brightness Synchrotron Radiation Beamlines II, (22 November 1996); https://doi.org/10.1117/12.259878
PROCEEDINGS
10 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Calibration of a vertical-scan long trace profiler at MSFC
Proceedings of SPIE (December 27 2001)
Optical parameter design and analyses of angle sensor
Proceedings of SPIE (November 06 2003)
A new five degree-of-freedom measurement method and system
Proceedings of SPIE (January 28 2009)
Design Of A Long Trace Surface Profiler
Proceedings of SPIE (April 20 1987)
Metrology of the mirrors at the Taiwan Light Source
Proceedings of SPIE (November 16 1999)

Back to Top