Infrared interferometer for optical testing

Klaus R. Freischlad; Jasmin Cote

doi:10.1117/12.276308

17 July 1996 Infrared interferometer for optical testing

Klaus R. Freischlad, Jasmin Cote

Proceedings Volume 2860, Laser Interferometry VIII: Techniques and Analysis; (1996) https://doi.org/10.1117/12.276308
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

An infra-red interferonieter for testing optical elements and assemblies in their operational wavelength band is described. The interferoineter is a phaseshifting, LUPI-style Twyman-Green interferometer operating at a wavelength of 3.392pm. The system is designed for optical testing in a vacuum chamber. For that purpose the interferometer is contained in a hermetic, vacuum-compatible enclosure, and all internal alignment functions are remotely controlled. The light source is an infrared HeNe-laser at 3392 p m. The camera sensing the interferograms consists of a PtSi CCD-array with 256x256 pixels. For operating the system in a vibration environment, short exposure pulses are generated from the laser light. In addition, a specialized phase.shifting data acquisition and reduction algorithm is employed which senses the random phase shifts and adapts the phase algorithm accordingly. A vacuum compatible diverger (f/2.5) and beam expander (250mm beam diameter) allow for a wide variety of optical testing configurations. Measurement results and system performance parameters are presented.

Citation Download Citation

Klaus R. Freischlad and Jasmin Cote "Infrared interferometer for optical testing", Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); https://doi.org/10.1117/12.276308

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