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17 July 1996 Nonoptical surface measurement by oblique incidence interferometry
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Abstract
Conventional interferometers are not always appropriate for measurement of rough or uneven non-optical surfaces. For the solution of this problem, an oblique incidence interferometry was proposed with a spatial phase-shifting technique of only one image. This technique can analyze surface profiles using only one image which contains high carrier frequency, and in this method such mechanical shifting device as requires high repeatability is not necessary. Therefore, more accurate and speedy measurement can be realized by using this principle. As an application of this technique, the Poison's ratio values of brittle materials are analyzed. The surface deformation after pure bending can be easily measured by this technique. Therefore Poison's ratio is calculated by relationship between Poison's ratio and the contour pauern of displacement from only two fringe images acquired before and after the bending.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yukitoshi Otani, Naoko Okuhara, and Toru Yoshizawa "Nonoptical surface measurement by oblique incidence interferometry", Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); https://doi.org/10.1117/12.276318
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