Precise surface measurement by local sampling phase shifting technique

Yukitoshi Otani; Hiroatsu Mori; Toru Yoshizawa

doi:10.1117/12.276297

17 July 1996 Precise surface measurement by local sampling phase shifting technique

Yukitoshi Otani, Hiroatsu Mori, Toru Yoshizawa

Proceedings Volume 2860, Laser Interferometry VIII: Techniques and Analysis; (1996) https://doi.org/10.1117/12.276297
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

Conventional phase shifting methods do not have enough phase resolution less than 1 deg. Although images sampling times for the phase shifting analysis have to be increased for the easy solution of this problem, there are some limits to get more images than five because of limited capacity of memory and detecting time of the image. In order to detect phase distribution of interferogram with high resolution, a local-sampling phase shifting technique is proposed. It is useful to increase the resolution of detected light intensity in the same quantized error. This method is verified by birefringence measurement in 256 x 256 values in short time with 0.02 deg of phase accuracy. This method is applied to measure surface profile measurement.

Citation Download Citation

Yukitoshi Otani, Hiroatsu Mori, and Toru Yoshizawa "Precise surface measurement by local sampling phase shifting technique", Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); https://doi.org/10.1117/12.276297

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