Optimization of polishing parameters in computer-controlled optical polishing process

Xuejun Zhang; Jingchi Yu; Zhongyu Zhang

doi:10.1117/12.245180

19 July 1996 Optimization of polishing parameters in computer-controlled optical polishing process

Xuejun Zhang, Jingchi Yu, Zhongyu Zhang

Proceedings Volume 2861, Laser Interferometry VIII: Applications; (1996) https://doi.org/10.1117/12.245180
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

Based on a number of technological experiments, the optimization proposal of CCOP was presented and the theoretical control model was properly modified to improve the polishing precision and efficiency. In addition, on a home-made CNC optical fabrication center FSGJ-1, a parabolic surface with a diameter of 200 mm was polished to 0.025 m rms within 30 hours.

Citation Download Citation

Xuejun Zhang, Jingchi Yu, and Zhongyu Zhang "Optimization of polishing parameters in computer-controlled optical polishing process", Proc. SPIE 2861, Laser Interferometry VIII: Applications, (19 July 1996); https://doi.org/10.1117/12.245180

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