Fast and accurate roughness characterization techniques for wafers and hard disks

Hendrik Rothe; Andre Kasper

doi:10.1117/12.256206

4 November 1996 Fast and accurate roughness characterization techniques for wafers and hard disks

Hendrik Rothe, Andre Kasper

Proceedings Volume 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays; (1996) https://doi.org/10.1117/12.256206
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

Especially for wafers, hard disks and flat panel displays fast and accurate technical means for roughness characterization are needed. However, speed and accuracy are contradictory. Generally speaking, fast roughness sensors are not accurate, and precise instruments are slow. It turned out in the last years that with multi aperture fiber optic sensors which acquire ARS/TIS data a very fast estimation of surface roughness is possible. But it is rather difficult to convince e.g. chip manufacturers that the results of such sensors are reliable, because there are no accepted international standards for these kinds of optical measurements. Therefore we decided to establish a setup of our ARS/TIS sensor for roughness characterization and an instrument for roughness measurement in a cleanroom consisting of the following parts: (1) 200 X 200 mm stages, speed 0.4 ms^-1, +/- 1 micron accuracy, acceleration 1 g; (2) visual inspection head consisting of 50 X objective and CCD camera; (3) AFM scan head; (4) ARS/TIS fiber optic sensor; and (5) laminar box. Topics of the paper are measurement philosophy, specs of the setup, architecture of the fiber optic ARS/TIS head, as well as data processing algorithms and software.

Citation Download Citation

Hendrik Rothe and Andre Kasper "Fast and accurate roughness characterization techniques for wafers and hard disks", Proc. SPIE 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (4 November 1996); https://doi.org/10.1117/12.256206

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