Development of EUV free-standing multilayer polarizers

Weibing Hu; Masaki Yamamoto; Makoto Watanabe

doi:10.1117/12.246184

16 August 1996 Development of EUV free-standing multilayer polarizers

Weibing Hu, Masaki Yamamoto, Makoto Watanabe

Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246184
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan

Abstract

Mo/Si transmission multilayers are studied theoretically for use as a polarizer at 80 eV. A multilayer of 99% polarization with a maximum transmittance of 8% was obtained by optimizing the thickness of Mo and Si. It is shown that the multilayer may be also used as a quarter-wave-plate. A new and reliable method of mounting free-standing multilayers is developed.

Citation Download Citation

Weibing Hu, Masaki Yamamoto, and Makoto Watanabe "Development of EUV free-standing multilayer polarizers", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); https://doi.org/10.1117/12.246184

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