Effect of crystalline orientation on photoelastic constant of Si single crystal

Kenji Gomi; Yasushi Niitsu

doi:10.1117/12.246229

16 August 1996 Effect of crystalline orientation on photoelastic constant of Si single crystal

Kenji Gomi, Yasushi Niitsu

Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246229
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan

Abstract

We developed an optical birefringence measurement equipment by using a photoelastic modulator and a polarized laser. A He-Ne infrared laser is used as a light source to measure the optical birefringence in silicon wafers. We explain the theory and process of the measurement of stress in silicon wafers. The magnitude of principal stress difference and also the direction of the principal stress are obtained simultaneously and quantitatively using our experiment. The optical birefringence of (100), (111) and (110) face silicon stressed specimens were measured. From the experimental results, the photoelastic constant depends on the crystalline orientation. By the stress-strain analysis of silicon single crystal, it was found that the relation between the principal strain difference and the retardation was independent of crystalline orientation.

Citation Download Citation

Kenji Gomi and Yasushi Niitsu "Effect of crystalline orientation on photoelastic constant of Si single crystal", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); https://doi.org/10.1117/12.246229

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available