Comparison of the Ti/TiN/AlCu/TiN stack with TiN/AlCu/Ti/TiN stack for application in ULSI metallization

Satish S. Menon; Ratan K. Choudhury

doi:10.1117/12.250881

13 September 1996 Comparison of the Ti/TiN/AlCu/TiN stack with TiN/AlCu/Ti/TiN stack for application in ULSI metallization

Satish S. Menon, Ratan K. Choudhury

Author Affiliations +

Proceedings Volume 2875, Microelectronic Device and Multilevel Interconnection Technology II; (1996) https://doi.org/10.1117/12.250881
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

The relative advantages and disadvantages of the two ULSI metallization stacks viz., Ti/TiN/AlCu/TiN and TiN/AlCu/Ti/TiN are described. The electromigration and thermal stability characteristics are compared using grain size of the Al metal, the XRD rocking curve peak and FWHM of the Al (111) orientation, SWEAT lifetime and electrical characteristics before and after thermal cycling of the test structures. In the literature, there exists work that report an improvement in the electromigration lifetime in the situation where Ti is in direct contact with Al due to the formation of TiAl₃. The results for submicron dimensions presented in this paper clearly point to very important requirements for those results to hold and highlight the danger in assuming its validity for submicron lines. The W- plug via schemes resulting from use of both these metallization stacks will be compared from both the electrical and reliability standpoint. The conflict arising between the functionality and reliability of the vias with the reliability of the metallization lines is discussed.

Citation Download Citation

Satish S. Menon and Ratan K. Choudhury "Comparison of the Ti/TiN/AlCu/TiN stack with TiN/AlCu/Ti/TiN stack for application in ULSI metallization", Proc. SPIE 2875, Microelectronic Device and Multilevel Interconnection Technology II, (13 September 1996); https://doi.org/10.1117/12.250881

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available