Electron emission phenomena controlled by a transverse electric field in compound emitters

Jadwiga Olesik; Bogdan Calusinski; Zygmunt Olesik

doi:10.1117/12.250933

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13 September 1996 Electron emission phenomena controlled by a transverse electric field in compound emitters

Jadwiga Olesik, Bogdan Calusinski, Zygmunt Olesik

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Proceedings Volume 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III; (1996) https://doi.org/10.1117/12.250933
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

Influence of an inner electric field on such emission phenomena like: secondary emission, photoemission and field emission has been investigated. The applied sample-emitter was a glass wafer (thickness 0.2 mm) covered on both sides by semiconducting films In₂O₃:Sn. A voltage (in the interval -2000V divided by 0V) generating transverse electric field was applied to one of the films. This film had a thickness of about 200 nm. The second film (emitting electrons) had a thickness 100 nm or 10 nm. The secondary emission measurements were made by the retarding field method using four grid retarding potential analyzer. It was found that the secondary emission coefficient changes non- monotonically with increasing field intensity. Electron emission measurements without using a primary electron beam were made with the electron multiplier cooperating with a multichannel pulse amplitude analyzer. The measurements were performed in the vacuum of about 2 multiplied by 10^-6 Pa. Influence of film thickness on the intensity of field controlled emission and field controlled photoemission was also studied. It was also found that the frequency of counts (generated by electrons in the electron multiplier) depends on the polarizing voltage approximately in an exponential way. Some departures from this dependence can be observed at higher U_pol voltages (above 1000 V). Thus, at an appropriate high voltage U_pol conditions for a cascade emission are created. At lower voltages the conditions correspond to a semiconductor with a negative electron affinity.

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Jadwiga Olesik, Bogdan Calusinski, and Zygmunt Olesik "Electron emission phenomena controlled by a transverse electric field in compound emitters", Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); https://doi.org/10.1117/12.250933

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