Micromirrors with single crystal silicon support structures

Zhimin Yao; Stephen W. Tang; Noel C. MacDonald

doi:10.1117/12.251256

23 September 1996 Micromirrors with single crystal silicon support structures

Zhimin Yao, Stephen W. Tang, Noel C. MacDonald

Proceedings Volume 2881, Microelectronic Structures and MEMS for Optical Processing II; (1996) https://doi.org/10.1117/12.251256
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

A novel process for fabrication of torsional micro-mirrors with large dimensions (300 X 240 micrometers and 150 X 120 micrometers ) is presented. The mirrors consist of a sputtered aluminum film on a layer of supporting oxide mounted on fully suspended single crystal silicon grids. The grids have an aspect ratio of 7:1 in order to provide a stiff backbone and to ensure flatness of the mirror surface. The mirrors thus do not bend due to the internal stresses. A new idea of actuation of torsional structures is also presented in this paper. Vertical near-comb type actuators were fabricated to drive the torsional structures.

Citation Download Citation

Zhimin Yao, Stephen W. Tang, and Noel C. MacDonald "Micromirrors with single crystal silicon support structures", Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); https://doi.org/10.1117/12.251256

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available