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23 September 1996 Micromirrors with single crystal silicon support structures
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Proceedings Volume 2881, Microelectronic Structures and MEMS for Optical Processing II; (1996) https://doi.org/10.1117/12.251256
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States
Abstract
A novel process for fabrication of torsional micro-mirrors with large dimensions (300 X 240 micrometers and 150 X 120 micrometers ) is presented. The mirrors consist of a sputtered aluminum film on a layer of supporting oxide mounted on fully suspended single crystal silicon grids. The grids have an aspect ratio of 7:1 in order to provide a stiff backbone and to ensure flatness of the mirror surface. The mirrors thus do not bend due to the internal stresses. A new idea of actuation of torsional structures is also presented in this paper. Vertical near-comb type actuators were fabricated to drive the torsional structures.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhimin Yao, Stephen W. Tang, and Noel C. MacDonald "Micromirrors with single crystal silicon support structures", Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); https://doi.org/10.1117/12.251256
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